Microsensors in Machatronics

The facilities which exist for the fabrication of miniature semiconductor components are adapted for  micro sensor design and development. The technology of sensor development is also known by the names micro mechanics and micro machining . 


     Micro sensor technology is an outgrowth of mechatronics industry because it uses the same materials and fabrication processes as integrated circuits. Fabricating a semi conductor device such as a transistor involves several processes

• Growing pure crystals of silicon
• growing layers of silicon dioxide
• Doping the silicon with impurities to change its semiconducting properties
• photo lithography
• etching.

Semiconductors are basically two-dimensional in nature and the devices are etched onto the top surface of silicon wafers. This technology has been extended to three dimensions in the case of micro sensors.


Sensing principle of micro sensors : 
     The primary characteristics of the micro sensors is that  it responds to a physical stimulus and transmits an impulse.
A signal is fed to the sensors that changes the form of energy, usually into electrical energy.The variable manipulation elements can convert the signal from analog to digital and can amplify or modulate the signal
Also contained in the sensing mechanism is a power supply for sensing and modulating purposes.